Manufacturing
TROVATO Deposition Systems –
The workhorse of OLED and Solar research proudly reside in corporate, government, and university facilities around the world. Our Research Systems span the globe offering solid performance, reliability, flexibility and ease of use in producing the most complex devise stacks.
These are NOT catalog evaporators. TROVATO Mfg stands ready to fulfill your unique needs with complete and integrated thin film vacuum deposition systems designed specifically for R&D in organic optoelectronics with: fully integrated computer control, sophisticated variant studies capability, and other specialized system specs. It’s all about seamless tooling and fixturing that’s easy to use and cost-competitive. Our user-friendly, intuitive, automated control systems can be customized for process applications and thin film production fixturing. Only the TROVATO automation package handles complex process requirements reducing errors, increasing repeatability and throughput.
The Trovato 300C
Powerful - Economical - Reliable
300mm X 300mm X 600mm vacuum chamber
The Trovato 300C is a COMPLETE and INTEGRATED thin film vacuum deposition system, designed specifically for R&D in:
OLED, OPV, OTFT, OLED SSL & Solar
With the addition of a spin coater, the Trovato 300C is also ideal for research in thin film POLYMER, QUANTUM DOT and Perovskite technology.
Fully integrated computer control
Simple, easy to use operator interface
Automated multi-layer thin film deposition program
Automated substrate fixture control
Automated indexing of masks – during process
Automated selection of evaporation sources
Automated pump sequencing and cryo regen
Fully automated recipe control for complex device structures
Produces multiple complex, unique devices on a single pumpdown
4 substrates 3 masks – standard
2 substrates 6 masks - optional
Other options available
Rotating fixture for uniform deposition
12 evporative sources standard
4 crystal rate monitors – upgradeable
Proprietary Trovato ULTRA HI-RES QCM monitoring and control
QUAD co-deposition standard:
1 3.3kw & 3 1.5kwpower supplies standard
All set for quad (4 material) co-deposition
Sophisticated variant studies capability:
Layer thickness
Constituent material ratios
Optimized uniformity with consistent results
Materials conformance
Integrated glovebox with low profile chamber access:
1.2 meter (48”) working area in the glovebox
Vacuum antechamber
<1ppm – O2, H2O
Optional expansion for:
encapsulation, UV ozone, spin coating, testing, etc.
Additional glovebox sections available
The Trovato 450C
Expanded Capability
450mm X 450mm X 750mm vacuum chamber
The Trovato 450C is a complete and integrated thin film vacuum deposition system, designed specifically for R&D in organic optoelectronics
OLED, OPV, OTFT, OLED SSL & Solar
With the addition of a spin coater, the Trovato 450C is also ideal for research in thin film POLYMER, QUANTUM DOT and Perovskite technology.
Fully integrated computer control
Simple, easy to use operator interface
Automated multi layer Thin film Deposition program
Automated Substrate fixture control
Automated Indexing of masks – during process
Automated Selection of evaporation sources
Automated pump sequencing and cryo regen
Fully automated recipe control for complex device structures
Produce multiple complex, unique devices on a single pumpdown
8 substrates 3 masks – is standard
Many optional configurations
1” sq. large area substrate/masking available
Rotating fixture for uniform deposition
16 sources standard
4 Crystal Rate Monitors (upgradeable)
Proprietary Trovato ULTRA HI-RES QCM monitoring and control
QUAD Co-deposition standard:
2 3.3kw power supplies and 2 1.5kw power supplies standard
Quad (4 material) co-deposition is standard
Sophisticated variant studies capability:
Layer thickness
Constituent material ratio(s)
Optimized uniformity and consistent results
Integrated glovebox with low profile chamber access:
Vacuum antechamber
<1ppm – O2, H2O
Work station for sample prep
Optional expansion for encapsulation, UV ozone, spin coating, testing, etc.
Additional glovebox sections available
Shown in 'right hand' configuration and with optional HEPA filtered laminar flow
Trovato 600C
Maximum Flexibility
600mm X 450mm X 750mm vacuum chamber
The Trovato 600C is a complete and integrated thin film vacuum deposition system, designed specifically for R&D in organic optoelectronics
OLED, OPV, OTFT, OLED SSL & Solar
With the addition of a spin coater, the Trovato 600C is also ideal for research in thin film POLYMER, QUANTUM DOT and Perovskite technology.
Fully integrated computer control
Simple, easy to use operator interface
Automated multi layer Thin film Deposition program
Automated Substrate fixture control
Automated Indexing of masks – during process
Automated Selection of evaporation sources
Automated pump sequencing and cryo regen
Produce multiple complex, unique devices on a single pumpdown
8 substrates metal, organic & variant – is standard
Many optional configurations
Rotating fixture for uniform deposition
20 source stations
4 Crystal Rate Monitors (upgradeable)
QUAD co-deposition standard
2 3.3kw & 2 1.5kw power supplies standard
Sophisticated variant studies capability:
Layer thickness
Constituent material ratio(s)
Optimized uniformity and consistent results
Integrated glovebox with low profile chamber access:
Vacuum antechamber
<1ppm – O2, H2O
Work station for sample prep
Optional expansion for encapsulation, UV ozone, spin coating, testing, etc.
Additional glovebox sections available
Trovato Flash
Easy & Economical
300mm round vacuum chamber with flip up lid/substrate holder
The Trovato Flash is a complete and integrated thin film vacuum deposition system, designed specifically for R&D in organic optoelectronics
OLED, OPV, OTFT, OLED SSL & Solar
With the addition of a spin coater, the Trovato 600C is also ideal for research in thin film POLYMER, QUANTUM DOT and Perovskite technology.
Easily integrated into the floor of a glovebox - can also be used as a stand-alone.
Fully integrated computer control
Simple, easy to use operator interface
Automated multi layer Thin film Deposition pro
Automated Selection of evaporation sources
Automated pump sequencing
Rotating fixture for uniform deposition
4 Crystal Rate Monitors (upgradeable)
Co-deposition standard
2 3.3kw power supplies standard
Optional expansion for encapsulation, UV ozone, spin coating, testing, etc.
Complete systems with glovebox integration available
Refurbished Systems
TROVATO innovation has been built deep into the design and manufacture of every standard and custom system.
That same TROVATO practice allows our ability to refurbish or redesign the tooling and fixturing of existing systems.
Solid engineering through design, fabrication and integration of computer controlled automation
Call for a quote
Refirb of an older Trovato 300
New glovebox interface and integration with the customer's existing Mbraun glovebox
Rebuilt cryo pump
New computer and Trovato software
Upgrade to Trovato Ultra-High Resolution QCM
Contact us for a quote on upgrading your system
Optical coater refurbished by TROVATO Mfg.
New PC based computer control for pumping and process
Modernized electrical system
Cryo pump stack
New E-Beam system
Custom Fixturing
Innovative fixturing solutions - customized to fit your needs
Solid engineering through design, fabrication and integration of computer controlled automation.
Call for a quote
Auto encapsulation system for OLED
